TRANSMISSION MECHANISM, SUBSTRATE POSITIONING DEVICE AND ROBOT

摘要

PURPOSE: A transmission mechanism, a substrate positioning device, and a robot are provided to accurately transmit the rotation of a driving source in the range of fluctuation which is less than the width of a pitch. CONSTITUTION: A driving pulley is formed on a driving shaft and has an external gear of a preset pitch width. A driven pulley is formed on a driven shaft and has an external gear of a preset pitch width. A belt (52c) has an internal gear of a preset pitch width engaged with the external gears of the driving pulley and the driven pulley. The belt consists of sub belts (52c-1,52c-2) of which pitch width periodically changes. Each sub belt is arranged in different phase states.