VIBRATION POWER GENERATION ELEMENT AND VIBRATION POWER GENERATION DEVICE PROVIDED WITH SAME

摘要

A vibration power generation element includes a base substrate having a support portion and a cantilever portion, and a power generation unit for generating alternating current power in response to vibration of the cantilever portion. The power generation unit includes: a lower electrode formed on one surface side of the base substrate so as to overlap the cantilever portion; a first piezoelectric layer formed on an opposite side of the lower electrode from the cantilever portion; an intermediate electrode formed on an opposite side of the first piezoelectric layer from the lower electrode; a second piezoelectric layer formed on an opposite side of the intermediate electrode from the first piezoelectric layer; and an upper electrode formed on an opposite side of the second piezoelectric layer from the intermediate electrode.