发明名称 SOLUTION AND PROCESS FOR ACTIVATING THE SURFACE OF A SEMICONDUCTIVE SUBSTRATE
摘要 A solution and a process are used for activating the surface of a substrate comprising at least one area formed from a polymer, for the purpose of subsequently covering it with a metallic layer deposited via an electroless process. The composition contains: A) an activator formed from one or more palladium complexes; B) a binder formed from one or more organic compounds chosen from compounds comprising at least two glycidyl functions and at least two isocyanate functions; and C) a solvent system formed from one or more solvents capable of dissolving said activator and said binder. The solution and process may be applied for the manufacture of electronic devices such as integrated circuits, especially in three dimensions.
申请公布号 EP2475805(B1) 申请公布日期 2013.08.07
申请号 EP20100749882 申请日期 2010.09.09
申请人 ALCHIMER 发明人 MEVELLEC, VINCENT;SUHR, DOMINIQUE
分类号 C23C18/16;C23C18/18;C23C18/20;C23C18/30;C23C18/32 主分类号 C23C18/16
代理机构 代理人
主权项
地址