| 摘要 |
The invention reduces generation of particles. An embodiment of the preset invention includes a target holder (6) for holding a target (4), a power source (12) for applying a power to the target holder (6), a substrate holder (7), a first shutter (14) capable of opening and closing between the target (4) and the substrate holder (7), a second shutter (19) located closer to the substrate holder (7) than to the first shutter (14), and capable of opening and closing between the target holder (6) and the substrate holder (7), and a controller (con) for controlling the power source (12) and the first and second shutters (14), (19). The controller (con) applies a first power to the target holder (6) in the state where the first shutter (14) is closed, then opens the first shutter (14), and further applies a second power higher than the first power to the target holder (6) in the state where the second shutter (19) is closed. |
