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发明名称
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING POSITION WITH RESPECT TO CHARGED PARTICLE BEAM
摘要
申请公布号
EP2402978(A4)
申请公布日期
2013.08.07
申请号
EP20090840714
申请日期
2009.10.23
申请人
HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人
MADOKORO, YUICHI;AIZAWA, MEGUMI;YOSHIZAWA, YUKIO
分类号
H01J37/147;H01J37/153;H01J37/22;H01J37/28;H01J37/30;H01J37/304;H01J37/305
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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