发明名称 Spacer structure for transistor device and method of manufacturing same
摘要 The present disclosure provides a bipolar junction transistor (BJT) device and methods for manufacturing the BJT device. In an embodiment, the BJT device includes: a semiconductor substrate having a collector region, and a material layer disposed over the semiconductor layer. The material layer has a trench therein that exposes a portion of the collector region. A base structure, spacers, and emitter structure are disposed within the trench of the material layer. Each spacer has a top width and a bottom width, the top width being substantially equal to the bottom width.
申请公布号 US8501572(B2) 申请公布日期 2013.08.06
申请号 US20100874362 申请日期 2010.09.02
申请人 KUO CHUN-TSUNG;LIU SHIH-CHANG;TSAI CHIA-SHIUNG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KUO CHUN-TSUNG;LIU SHIH-CHANG;TSAI CHIA-SHIUNG
分类号 H01L21/331 主分类号 H01L21/331
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