发明名称 Strained semiconductor device and method of making same
摘要 In a method of making a semiconductor device, a gate dielectric is formed over the semiconductor body. A floating gate is formed over the gate dielectric, an insulating region over the floating gate, and a control gate over the insulating region. The gate dielectric, floating gate, insulating region, and control gate constitute a gate stack. A stress is caused in the gate stack, whereby the band gap of the gate dielectric is changed by the stress.
申请公布号 US8502299(B2) 申请公布日期 2013.08.06
申请号 US201213363936 申请日期 2012.02.01
申请人 YAN JIANG;SHUM DANNY PAK-CHUM;INFINEON TECHNOLOGIES AG 发明人 YAN JIANG;SHUM DANNY PAK-CHUM
分类号 H01L29/788 主分类号 H01L29/788
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