发明名称 Method of manufacture of atomically thin boron nitride
摘要 The present invention provides a method of fabricating at least one single layer hexagonal boron nitride (h-BN). In an exemplary embodiment, the method includes (1) suspending at least one multilayer boron nitride across a gap of a support structure and (2) performing a reactive ion etch upon the multilayer boron nitride to produce the single layer hexagonal boron nitride suspended across the gap of the support structure. The present invention also provides a method of fabricating single layer hexagonal boron nitride. In an exemplary embodiment, the method includes (1) providing multilayer boron nitride suspended across a gap of a support structure and (2) performing a reactive ion etch upon the multilayer boron nitride to produce the single layer hexagonal boron nitride suspended across the gap of the support structure.
申请公布号 US8501024(B2) 申请公布日期 2013.08.06
申请号 US20100895624 申请日期 2010.09.30
申请人 ZETTL ALEXANDER K.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 ZETTL ALEXANDER K.
分类号 B44C1/22 主分类号 B44C1/22
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