| 发明名称 |
Angular resolved spectroscopic scatterometer |
| 摘要 |
A spectroscopic system may include: a spectroscopic scatterometer; an angular-resolved spectrometer; and a fiber bundle having a two-dimensional input surface and a one-dimensional output surface.
|
| 申请公布号 |
US8502977(B1) |
申请公布日期 |
2013.08.06 |
| 申请号 |
US20100791446 |
申请日期 |
2010.06.01 |
| 申请人 |
MALEEV IVAN;KLA-TENCOR CORPORATION |
发明人 |
MALEEV IVAN |
| 分类号 |
G01J3/46 |
主分类号 |
G01J3/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
