CYLINDER SURFACE TREATMENT FOR MONOCHLOROSILANE

摘要

PURPOSE: A method of passivating is provided to passivate a container and the inner surface of the container for stably storing mono chlorosilane without the decomposition of the mono chlorosilane. CONSTITUTION: A container has an inner surface, and contains large amount of mono chlorosilane. The inner surface contains carbon steel or stainless steel, and is reformed by the mechanical abrasion before storing the mono chlorosilane and the exposure to silicon hydride or chlorosilane. The container is capable of storing the mono chlorosilane by maintaining the degradability of the mono chlorosilane less than 0.1% per month at the ambient temperature. The mechanical abrasion is conducted by a process selected from shot blasting, glass bead blasting, or abrasive slurry polishing. The mechanical abrasion is conducted using abrasive slurry. [Reference numerals] (1) Container; (2) Container reforming, surface reforming, producing surface; (3) Charging the container; (4) Controlling the temperature of the container; (5) Storing and transferring MCS to the container; (6) Removing the MCS from the container