| 摘要 |
A DLC-coated member (100) has a base (200), an intermediate layer (300) that covers the surface of the base (200), and a DLC film (400) that covers the surface of the intermediate layer (300). The intermediate layer (300) has a five-layer structure, constituted of a first intermediate layer (301), a second intermediate layer (302), a third intermediate layer (303), a fourth intermediate layer (304), and a fifth intermediate layer (305). The five layers (301 to 305) are made of DLC to which Si has been added. Among the layers (301 to 305), the Si concentration in the first intermediate layer (301) is the highest, and that in the fifth intermediate layer (305) is the second highest. The Si concentrations in the second intermediate layer (302), third intermediate layer (303), and fourth intermediate layer (304) are lower than those in the first intermediate layer (301) and fifth intermediate layer (305).
|
