| 摘要 |
PURPOSE: A trimethylamine gas sensor and a manufacturing method thereof are provided to improve sensitivity for trimethylamine gas at a relatively low temperature. CONSTITUTION: A trimethylamine gas sensor includes a silicon substrate (100), a diaphragm layer (90), a temperature sensor (300), a first insulating layer (80), a heater (200), a second insulating layer (70), a detecting film (500), and an Au electrode (400). The diaphragm layer on the etched silicon substrate is formed with Si3N4/SiO2/Si3N4. The temperature sensor is formed on the diaphragm layer. The first insulating layer covering the temperature sensor is coupled to the diaphragm layer. The heater is formed on the first insulating layer. The second insulating layer covering the heater is coupled to the first insulating layer. The detecting film on the second insulating layer reacts with trimethylamine gas. The Au electrode is formed on the detecting film. |
