| 摘要 |
PURPOSE: A coating material for thermal spray and a manufacturing and coating method thereof are provided to improve the durability and lifespan of components and to guarantee a chamber in a high purity condition by applying Zr-doped Y2O3 coating layer. CONSTITUTION: A coating method of coating materials for thermal spray is as follows. Mixed powder in which Y2O3 powder and ZrO2 powder are mixed, binder, and dispersing agent are put in liquid solvent. Uniformly mixed slurry is manufacture by ball-milling. The mixed solution of the slurry is sprayed as micron sized droplets and the solvent is removed under a high temperature air or an inner gas condition. Granule powders are manufactured and is thermally treated at 1,000-1,600°C. |
