Making planar electrochemical microcell used in analysis system, comprises providing substrate including first and second layers made of electrically insulating and conductive materials, and etching second layer by laser radiation pulses

摘要

The method comprises providing (2) a substrate that extends along its plane and comprises a first layer made of an electrically insulating material whose resistivity at a temperature of 20[deg] C is greater than 10 5> omega m and a second layer made of an electrically conductive material whose resistivity at a temperature of 20[deg] C is less than 10 -> 4> omega m, and etching (2) the second layer to define and electrically insulate a working electrode, a counter electrode and a reference electrode. The etching step is carried out by laser radiation pulses. The method comprises providing (2) a substrate that extends along its plane and comprises a first layer made of an electrically insulating material whose resistivity at a temperature of 20[deg] C is greater than 10 5> omega m and a second layer made of an electrically conductive material whose resistivity at a temperature of 20[deg] C is less than 10 -> 4> omega m, and etching (2) the second layer to define and electrically insulate a working electrode including a first measuring face that is parallel to the plane of substrate and has a surface of >= 100 nm 2>, a counter electrode including a second measuring face that is parallel to the plane of substrate, extends around the first measuring face and has a surface, which is ten times greater than that of the first measuring face and a reference electrode including a third measuring face that is parallel to the plane of substrate. The second layer is directly disposed on the first layer, and is made of a carbonaceous material. The etching step is carried out by laser radiation pulses, where a duration of each pulse is less than 100 ps and the pulses are repeated at a repetition frequency of >= 1kHz. An independent claim is included for an electrochemical analysis system.