ATTUATORE ELETTROMAGNETICO INTEGRATO, IN PARTICOLARE MICRO-POMPA ELETTROMAGNETICA PER UN DISPOSITIVO MICROFLUIDICO BASATO SU TECNOLOGIA MEMS, E RELATIVO PROCEDIMENTO DI FABBRICAZIONE

摘要

An integrated electromagnetic actuator comprising: a first structural layer; a flexible membrane, extending over the first structural layer and comprising regions of ferromagnetic material; a chamber, delimited between the first structural layer and the flexible membrane; a winding, comprising a plurality of turns of conductive material and extending within the first structural layer; and a core element made of ferromagnetic material, extending within the first structural layer, inside the winding.