| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibration piece which accurately forms grooves of the vibration piece.SOLUTION: A vibration piece includes: a base part; and vibration arms which are formed protruding from the base part, and grooves are formed in the vibration arms. A manufacturing method of the vibration piece includes the steps of: concurrently forming an external form pattern of the vibration piece and a pattern, in which film thicknesses of photo resist films 60a corresponding to the grooves are set so as to be thinner than a photo resist film 60 of an internal form of the vibration piece, on the photo resist film 60 covering a metal film 20 formed on a substrate 10; etching the substrate 10 to form an external form of the vibration piece; eliminating the photo resist films 60a corresponding to the grooves to expose the metal film 20; eliminating portions of the metal film 20 corresponding to the grooves; and etching the substrate to form the grooves. |
