发明名称 APPARATUS AND METHOD FOR TREATING PLATE-SHAPED PROCESS ITEMS
摘要 <p>In apparatuses and methods for treating a plate-shaped process item comprising a bottom side, a top side and edges between the bottom side and the top side with a process medium, a transport means is used, which comprises an endless means with support elements projecting from the same. A bottom side of the plate-shaped process item is supported on support elements of the transport means and the transport means is driven to move the support elements together with the supported plate-shaped process item in parallel to a process media level of a process medium. In a first operating mode, during a movement of the plate-shaped process item in parallel to the process media level, no parts of the transport means engage the edges of the plate-shaped process item.</p>
申请公布号 WO2013110582(A1) 申请公布日期 2013.08.01
申请号 WO2013EP51091 申请日期 2013.01.22
申请人 SINGULUS STANGL SOLAR GMBH 发明人 GRAEFF, MICHAEL;MENSCHICK, MARTIN MAXIMILIAN
分类号 H01L21/677;H01L21/67 主分类号 H01L21/677
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