| 摘要 |
PROBLEM TO BE SOLVED: To suppress tensile stress caused by thermal expansion and to suppress generation of cracks.SOLUTION: A plate-like silicon carbide ceramic plate 10, containing silicon carbide as a chief material and having a principal plane 5, comprises: an outside part 4 including an outer peripheral end 2 in x direction along a principal plane 5; and an inner part 8 positioned on a center O side than the outside part 4, wherein density of the outside part 4 is lower than that of the inner part 8. |
