| 摘要 |
PROBLEM TO BE SOLVED: To provide an immersion formulation for hard disk substrate which prevents performance deterioration of a hard disk.SOLUTION: An immersion formulation for hard disk substrate containing a phosphonic acid-based chelator is applied to an immersion process. An immersion liquid for hard disk substrate is an aqueous solution which contains the immersion formulation for hard disk substrate, has a content of a phosphonic acid-based chelator being 0.1-500 mass ppm, and has pH7-12. The method includes an immersion process for immersing a hard disk substrate in the immersion fluid for hard disk substrate. |
