| 摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration in air cleanliness in a cleanroom when receiving a substrate from an outside.SOLUTION: An outside and inside of a cleanroom 101 are partitioned by a wall portion 131. An air conditioning section 160 increases air cleanliness inside the cleanroom 101 in comparison with air cleanliness outside the same, and increases atmospheric pressure inside the same in comparison with atmospheric pressure outside the same. An opening 141 is positioned in a part of the wall portion 131. Conveyors 600 are arranged outside and inside the cleanroom 101 across the wall portion 131 so that a substrate 400 is conveyed through the opening 141. On a side of the wall portion 131 inside the cleanroom 101, flow straightener portions 700, 710 are arranged at an edge of the opening 141 facing at least one principal plane of the substrate 400 conveyed by the conveyor 600, and increases flow speed of air flows 171, 172 generated by a difference in the atmospheric pressure between the inside and outside of the cleanroom 101 caused by the air conditioning section 160. |
