WAFER TRANSFER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a wafer transfer device capable of preventing a wafer from being crushed when housed in a cassette.SOLUTION: A support mechanism supporting a plurality of wafers 881 includes a liquid jet mechanism for wafer flotation that forms a gap between the plurality of wafers by jetting liquid toward the plurality of wafers 881 supported by the support mechanism; a wafer receiving mechanism receiving the wafer positioned at the top among the plurality of wafers 881; a relay conveyor 32 transferring the wafer from the wafer receiving mechanism, and a speed reduction conveyor 33 reducing the speed of the wafer 881 sent by the relay conveyor 32.