| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply head which sufficiently performs purge of gas diffusion chambers and inhibits unnecessary deposits from occurring in an unintentional area.SOLUTION: A gas supply head includes: gas diffusion chambers 101, each of which is formed by a linear cylindrical space; multiple gas discharge holes 102 which are provided to correspond to the gas diffusion chambers 101 and form a row; first gas supply ports 103 provided at one ends of the gas diffusion chambers 101 and connected with a gas supply system 9 supplying a gas to the gas diffusion chambers 101; gas exhaust ports 104 provided at the other ends of the gas diffusion chambers 101 and connected with a gas exhaust system 10 exhausting the gas from the gas diffusion chambers 101. |
