| 摘要 |
Provided is a three-dimensional measurement device that can improve measurement precision when performing three-dimensional measurements. A substrate inspection device (10) is provided with: a conveyor (13) that transports a printed circuit board (1); an illuminating device (14) that shines any of four light patterns with different brightnesses on the printed circuit board (1); and a camera (15) that images the printed circuit board (1) on which the light pattern is being shined. Furthermore, when four pieces of image data, which have been imaged under a light pattern with the same brightness and the phase of which has been changed by a prescribed amount, are treated as one group, four groups of data imaged under the four light patterns are acquired for each prescribed transport amount of the printed circuit board (1). Next, whether or not the brightness value for each pixel of the image data is included in a preset effective range (H) is determined, a group of data that has a brightness value for each pixel of the image data within the effective range (H) is extracted from the four groups of data, and three-dimensional measurements are carried out on the basis of the extracted group of data. |
