| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump system in which immediate and flat movement and correct and repeatable position control of fluid motion and dispensation amount are achieved.SOLUTION: A pump system includes a pump, a brushless DC motor coupled with a dispensation stage piston in a dispensation pump via a lead screw, a computer readable medium storing software instructions for controlling the pump, a position sensor combined with the motor so as to provide real time position feedback of the dispensation stage piston, and a processor connected with the computer readable medium, the position sensor and the pump. The instruction can be executed by the processor so as to control the motor according to a control scheme in a semiconductor production process. The control scheme includes a first operation frequency for the dispensation part of a cycle, and a second operation frequency for the non-dispensation part thereof. The latter is selected to minimize generation of heat during the cycle. |
