发明名称 SEALING APPARATUS FOR A PROCESS CHAMBER
摘要 A sealing apparatus is provided herein. In some embodiments, the sealing apparatus includes an annular body including a first portion having a circular cross-section and a second portion extending radially outward from the first portion, wherein the second portion has a rectangular cross-section. In some embodiments, a sealing apparatus includes a body configured to be retained in a recess of a first surface; an arm extending from the body away from the first surface and configured to provide a force when deflected towards the body by a second surface to form a seal between the first surface and the second surface.
申请公布号 US2013192756(A1) 申请公布日期 2013.08.01
申请号 US201313800750 申请日期 2013.03.13
申请人 APPLIED MATERIALS, INC.;APPLIED MATERIALS, INC. 发明人 YUDOVSKY JOSEPH
分类号 F16J15/02 主分类号 F16J15/02
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