| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for restricting occurrence of pull-in, in a movable mirror that uses an actuator including an interdigital electrode.SOLUTION: The actuator comprises: a movable portion connected to a reflecting member having a reflecting face; a movable interdigital electrode located a distance away from the reflecting member, supported by the movable portion, and extending in a direction parallel to the reflecting face; a fixed interdigital electrode supported by a support portion, extending in a direction parallel to the reflecting face, and alternatively arranged with the movable interdigital electrode; and voltage control means that applies a voltage to the movable interdigital electrode and the fixed interdigital electrode, thereby displacing the movable interdigital electrode and the movable portion in the direction of the normal of the reflecting face. A portion supporting the movable interdigital electrode and a portion supporting the fixed interdigital electrode are arranged such that the movable interdigital electrode and the fixed interdigital electrode are exchanged when the movable interdigital electrode is displaced in the normal direction of the reflecting face of the movable interdigital electrode. |
