发明名称 DECOUPLING FINFET CAPACITORS
摘要 A semiconductor device including field-effect transistors (finFETs) and fin capacitors are formed on a silicon substrate. The fin capacitors include silicon fins, one or more electrical conductors between the silicon fins, and insulating material between the silicon fins and the one or more electrical conductors. The fin capacitors may also include insulating material between the one or more electrical conductors and underlying semiconductor material.
申请公布号 US2013193500(A1) 申请公布日期 2013.08.01
申请号 US201213362796 申请日期 2012.01.31
申请人 CHEN CHUNG-HUI;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN CHUNG-HUI
分类号 H01L27/088;H01L21/20 主分类号 H01L27/088
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