发明名称 Verfahren zur Herstellung von von einer Matrix abgedeckten Quantenpunkten
摘要 <p>A method for producing quantum dots embedded in a matrix on a substrate includes the steps of: depositing a precursor on the substrate, the precursor including at least one first metal or a metal compound; contacting the deposited precursor and uncovered areas of the substrate with a gas-phase reagent including at least one second metal and/or a chalcogen; and initiating a chemical reaction between the precursor and the reagent by raising a temperature thereof simultaneously with or subsequent to the contacting so that the matrix consists exclusively of elements of the reagent.</p>
申请公布号 DE102006060366(B8) 申请公布日期 2013.08.01
申请号 DE20061060366 申请日期 2006.12.16
申请人 HELMHOLTZ-ZENTRUM BERLIN FUER MATERIALIEN UND ENERGIE GMBH 发明人 FUERTES MARRON, DAVID;SADEWASSER, SASCHA, DR.;LEHMANN, SEBASTIAN, DIPL.-MIN.;LUX-STEINER, MARTHA CHRISTINA, PROF. DR.
分类号 H01L21/20;B82B3/00;C23C14/00;C23C26/00;H01L21/02;H01L21/04 主分类号 H01L21/20
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