PHOTOELECTRIC CONVERSION DEVICE, IMAGING SYSTEM, AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE

摘要

PROBLEM TO BE SOLVED: To improve performance of photoelectric conversion means.SOLUTION: The photoelectric conversion means comprises a semiconductor element having a laminated structure composed of a conductor, a semiconductor, and an insulator provided between the conductor and the semiconductor. The insulator is a silicon oxide film whose main part is positioned between the conductor and the semiconductor contains nitrogen. The maximum nitrogen concentration of the main part is higher than 0.10 atom%. The interface nitrogen concentration on a semiconductor side surface of the main part is 0.10 atom% or lower.