发明名称 HANDLER AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a handler which can be downsized.SOLUTION: A handler according to the prevention includes a support 94, a holder 98 holding an IC chip 100, and a position change mechanism portion 700 which is disposed between the support 94 and the holder 98, and changes the position of the IC chip 100 held by the holder 98 with respect to the support 94. The position change mechanism portion 700 includes a two-dimensional movement portion 710 provided movably in a predetermined direction, a rotation portion 97 provided rotatably with respect to the two-dimensional movement portion 710, and piezoelectric actuators 200, 300 which move the two-dimensional movement portion 710 with respect to the support 94.
申请公布号 JP2013148397(A) 申请公布日期 2013.08.01
申请号 JP20120007468 申请日期 2012.01.17
申请人 SEIKO EPSON CORP 发明人 SHIOZAWA MASAKUNI;MIYAZAWA OSAMU;NISHIMURA YOSHITERU
分类号 G01R31/26 主分类号 G01R31/26
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