发明名称 MACHINING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a machining device in which the uneven wear of a machining blade is monitored and the tip of the machining blade is adjusted to have a regular shape when an uneven wear amount reaches a predetermined amount or larger.SOLUTION: A machining device includes: a confirmation table 8 for holding a confirmation object to be machined and into which the machining blade 33 is cut to confirm a wear amount; and a polishing table 9 with which the machining blade 33 contacts to polish the tip of the machining blade. A cut groove formed at the confirmation object to be machined is imaged and whether the imaged groove is favorable or unfavorable is determined. When the imaged groove is determined to be unfavorable, the tip of the machining blade 33 is polished by using the polishing table 9 to adjust the tip to have a regular shape, so that a machining failure is prevented from occurring when the object to be machined is machined.
申请公布号 JP2013146831(A) 申请公布日期 2013.08.01
申请号 JP20120009809 申请日期 2012.01.20
申请人 DISCO CORP 发明人 MINATO KOKICHI;ONUMA HIROKI
分类号 B24B49/18;B24B53/00;B24B53/12;H01L21/304 主分类号 B24B49/18
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