| 摘要 |
PROBLEM TO BE SOLVED: To provide a centrifuge in which vacuum inside a rotary chamber where a rotor is placed can be stably maintained and in which it can be detected whether a necessary amount of oil to be used in an oil diffusion pump exists or not.SOLUTION: A centrifuge includes a vacuum pump machine configured of an auxiliary vacuum pump and an oil diffusion pump for exhausting gas inside a rotary chamber to outside, in which a rotor rotates at high speed. In the centrifuge, a thermistor 8 for detecting oil temperature and an oil surface inside a boiler 5a where stored oil 5b of the oil diffusion pump is housed is provided inside the boiler 5a, and power of a heater 5c is adjusted with the temperature detected by the thermistor 8, so that a degree of vacuum inside the rotary chamber is stably reduced from atmospheric pressure to a high vacuum state. Besides, when the heater 5c does not heat, a current is carried through the thermistor 8 for self-heating and it is determined from variation in a resistance value whether the oil exists or not at a position at which the thermistor 8 is placed. |
