ACTIVE SPECIES GENERATING UNIT AND ACTIVE SPECIES GENERATING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an active species generating unit capable of achieving a high density and high output corona discharge to generate active species in a wide range while ensuring the safety by increasing the insulation between a needle electrode and a counter electrode to thereby increase the generating amount of the active species and to reduce the size of the apparatus.SOLUTION: An active species generating unit 8 comprises: a frame 22 having a plate member formed with an opening in a central area and plural supports attached thereto; a discharge electrode 17 including a metal plate having a needle 25 and a power source connection part 26 connected thereto; an insulation base plate 16 formed of a ceramic applied with a semiconductive material over the surface thereof and including a hole 21 in a central area; a counter electrode 23 of a metal plate including a power source connection part 19 having an opening in the center thereof; and a plate fixing part 24 that sandwiches the counter electrode 23 and the insulation base plate 16 overlapped with each other between the frame 22 and the same. The active species generating unit 8 generates active species by means of corona discharge by applying a voltage to the discharge electrode 17 and the counter electrode 23 from a power supply 20. The plate fixing part 24 is structured to seal the insulation base plate 16 and the counter electrode 23 excepting the power source connection part 26 thereof.