发明名称 |
APPARATUS FOR FORMING FINE PATTERNS CAPABLE OF SWITCHING DIRECTION OF POLARIZATION INTERFERENCE PATTERN IN LASER SCANNING METHOD AND METHOD OF FORMING FINE PATTERNS USING THE SAME |
摘要 |
An apparatus for forming fine patterns by employing polarization interference in a laser scanning method comprises a laser generator; a calcite wave plate configured to refract at least one of the S wave and the P wave, polarized by the polarization plate, an analyzer configured to make coincident with each other the polarization directions of the S wave and the P wave having the paths spaced apart from each other by the calcite wave plate; an exposure lens; an exposure head; an X stage; and a rotation stage configured to move the substrate mounting unit around a Z axis which is a vertical axis.
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申请公布号 |
US2013194558(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
US201013878482 |
申请日期 |
2010.11.12 |
申请人 |
RHEE HYUG-GYO;LEE YUN-WOO;KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
RHEE HYUG-GYO;LEE YUN-WOO |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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