发明名称 OXIDATION PREVENTING GAS SPRAY UNIT
摘要 <p>This oxidation preventing gas spray unit is provided with: a base part (10) with a hollow plate shape inside which oxidation preventing gas flow paths (53, 54) are formed; an oxidation preventing gas inlet (20) that allows oxidation preventing gas to flow into the oxidation preventing gas flow paths (53, 54); a through hole (30) that passes through the base part (10) in the direction of thickness such that a capillary (72) is inserted and removed, linked to the oxidation preventing gas flow paths (53, 54), and in which the oxidation preventing gas flows; and a film heater (40) that is attached to the outer surface of the base part (10) around the through hole (30). The structure is compact and free air balls can be heated efficiently.</p>
申请公布号 WO2013111452(A1) 申请公布日期 2013.08.01
申请号 WO2012JP81135 申请日期 2012.11.30
申请人 SHINKAWA LTD. 发明人 MAEDA, TORU;SAKAKURA, MITSUAKI
分类号 H01L21/60 主分类号 H01L21/60
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