发明名称 SAMPLE OBSERVATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sample observation method capable of accurately observing a macroscopic dispersion state of a sample comprising a material having a dual-phase structure in which a second phase is dispersed in a parent phase, in terms of a specific phase of the second phase that affects quality of the material.SOLUTION: Provided is a sample observation method for observing, for a sample having a dual-phase structure in which a second phase having a minute internal structure is dispersed in a parent phase, a state of the second phase having a minute internal structure. The sample observation method includes a dispersion state observation step of obtaining a reflection electron image of the sample under the condition where an accelerating voltage is 7kV or more and a capturing angle is 60° or more by using a scanning electron microscope, and observing a dispersion state of the second phase having a minute internal structure.
申请公布号 JP2013148580(A) 申请公布日期 2013.08.01
申请号 JP20120279929 申请日期 2012.12.21
申请人 JFE STEEL CORP 发明人 SUEYOSHI HITOSHI;YAMADA KATSUMI;SATO KAORU;NAKAMICHI JIRO
分类号 G01N23/225;H01J37/20;H01J37/28 主分类号 G01N23/225
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