发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can inhibit electric field concentration to a lower end of a wide opening width part of a trench.SOLUTION: A semiconductor device comprises: a trench 20 which is formed on a surface of a semiconductor substrate 12 and which has a shape in which a first trench part 22 and a second trench part 24 are crossing. The trench 20 includes a crossing part 26 of the first trench part 22 and the second trench part 24, which has a larger opening width in comparison with other parts. An insulator layer 44 is formed inside the crossing part 26, and a gate electrode 40 is not formed inside the crossing part. On the other hand, the gate electrode 40 is formed inside parts other then the crossing part 26.
申请公布号 JP2013149836(A) 申请公布日期 2013.08.01
申请号 JP20120010017 申请日期 2012.01.20
申请人 TOYOTA MOTOR CORP 发明人 HORIMOTO SHUHEI;SAITO JUN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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