| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film solar cell manufacturing method with more excellent production efficiency.SOLUTION: A first electrode layer 12 is formed on a substrate 10 that has an insulation property at least on its surface, and an electrode layer separation groove 21 for separating the first electrode layer 12 into plural regions is formed. After a photoelectric conversion layer 13 is laminated thereon, a first element separation groove 22 and a conducting groove 23 are formed from its lamination face side. The first element separation groove 22 is filled with an insulation material 30, so as to form a second electrode layer 16 including a surface of the insulation material 30, and embed a second electrode material in the conducting groove 23. Furthermore, a second element separation groove 24 of a depth for exposing the first electrode layer 12 from a surface of the second electrode layer 16 is formed opposite to the first element separation groove 22 with respect to the conducting groove 23, and is filled with an insulation material 34, so as to manufacture an integrated solar cell. |
