| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique that efficiently performs defect inspection of a pattern without a need of complicated operation.SOLUTION: A visual inspection device 1 comprises an inspection part 5 for detecting a defective pattern referring to an image of a surface of a substrate 9 with a pattern taken by a photographing part 3. The inspection part 5 comprises: an inspection task holding part 51 that holds a plurality of inspection tasks that stipulate inspection contents; a plurality of GPUs 591 that execute image processing with regard to defect detection; and an image processing control part 55 that controls each of a plurality of image processing parts according to an inspection task. The image processing control part 55 sequentially executes new image processing at the plurality of GPUs 591 according to the next inspection task held at the inspection task holding part 51 at an order that image processing according to an inspection task is finished. |
