| 摘要 |
A measurement apparatus includes a mount configured to mount an object, a probe configured to move with respect to the object so as to measure a shape of the object, an interferometer configured to measure a position of the probe with respect to a reference mirror, and a calculator configured to calculate the shape of the object using a measured value relating to the shape of the object that is obtained based on the position of the probe measured by the interferometer and a relative displacement between the object and the reference mirror that is obtained based on a signal from a sensor for the object and the reference mirror while the probe is moved.
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