| 摘要 |
Provided are a radiation discharge target and a radiation emission device whereby adhesion of a layered radiation target is stabilized, output fluctuations associated with operating temperature histories are alleviated, and a stable radiation emission characteristic is present. This radiation target comprises a support substrate, a target layer which emits radiation by illumination with an electron beam, and an intermediate layer which is located between the support substrate and the target layer. The intermediate layer is 1µm or less in thickness and has titanium as a primary constituent. At least a portion of the titanium exhibits a beta phase at 400°C or below. |
