发明名称 |
METHODS AND SYSTEMS FOR MEMS CMOS-BASED RADIO FREQUENCY FILTERS HAVING ARRARYS OF ELEMENTS |
摘要 |
The invention provides systems and methods for producing a chip comprising a radio-frequency filter which is based on MEMS and is arranged inside an integrated circuit. In one aspect, the systems and methods provide a chip which includes electronic elements formed on a substrate made of semiconductor material. The chip additionally includes an interconnection layer stack which includes layers of conductive material which are separated by layers of dielectric material. A radio-frequency filter is formed inside the interconnection layer stack by applying gaseous HF to the interconnection layers. The radio-frequency filter includes a plurality of resonator elements which are mechanically decoupled. |
申请公布号 |
WO2013068633(A3) |
申请公布日期 |
2013.08.01 |
申请号 |
WO2012ES70788 |
申请日期 |
2012.11.12 |
申请人 |
BAOLAB MICROSYSTEMS SL |
发明人 |
MONTANYA SILVESTRE, JOSEP;LLAMAS MOROTE, MARC ANTONIO |
分类号 |
B81C1/00;H03H3/007 |
主分类号 |
B81C1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|