| 摘要 |
PROBLEM TO BE SOLVED: To separate signals by a bulk wave from signals by elastic waves and acquire physical characteristics of a measured object with high precision on the basis of signals by surface acoustic waves.SOLUTION: An instrument for measuring characteristics of a measured object includes a surface acoustic wave element which comprises: a comb-shaped electrode formed on a first surface of a piezoelectric substrate, exciting elastic waves, and receiving reflection based on the elastic waves; a reflection part having a third surface formed at a position different from the first surface in the normal direction of the first surface between the comb-shaped electrode and a second surface orthogonal to the first surface in the propagation direction of the elastic waves, and a fourth surface connecting an end part of the first surface formed perpendicularly to the normal direction of the first surface and the third surface; a reaction field which is formed between the comb-shaped electrode and the reflection part and on which the measured object is loaded; and a propagation part formed between the reflection part and the second surface. The characteristics of the measured object are obtained from the elastic waves propagating from the comb-shaped electrode through the reaction field, reflected by the fourth surface, and received by the comb-shaped electrode, on the basis of the surface acoustic waves separated from the bulk waves included in the surface acoustic waves reflected by the second surface and received by the comb-shaped electrode. |
