PROBE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a high-quality probe with a nano-tube bundle composed of a plurality of nano-tubes strongly bonded.SOLUTION: A probe 1 comprises: a probe base part 2 having one end part 2b being a free-end and the other end part 2c supported in cantilever; a coupling electrode 3 in a belt-like shape formed on a surface of the probe base part and extended from the other end part to the one end part of the probe base part; and a nano-tube bundle 4 formed by aggregating a plurality of nano-tubes and coupled to the one end part of the probe base part through the coupling electrode. The nano-tube bundle is formed so as to gradually become pointed from a base end part 4a to a tip part 4b, and the base end part is coupled to the one end part of the probe base part so that the tip part is protruded outside of the one end part of the probe base part, and the nano-tube bundle and the coupling electrode are further chemically coupled through a selective binding substance having affinity to the coupling electrode.