发明名称 |
CLEANING APPARATUS, EQUIPMENT, AND METHOD |
摘要 |
A cleaning apparatus for cleaning an object includes a cleaning tank holding a cleaning liquid, the object being cleanable by the cleaning liquid. A coupling tank holding an intermediate medium is in contact with a portion of the cleaning tank. An ultrasonic wave generation unit is disposed at the coupling tank and configured to ultrasonically vibrate the cleaning liquid via the intermediate medium. A modification unit is configured to modify a difference in sonic velocity between the cleaning liquid and the intermediate medium.
|
申请公布号 |
US2013192628(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
US201213618426 |
申请日期 |
2012.09.14 |
申请人 |
MORI YOSHIHIRO;HAIBARA TERUO;KUBO ETSUKO;UCHIBE MASASHI;SILTRONIC AG |
发明人 |
MORI YOSHIHIRO;HAIBARA TERUO;KUBO ETSUKO;UCHIBE MASASHI |
分类号 |
B08B3/12;B08B7/02 |
主分类号 |
B08B3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|