| 摘要 |
The purpose of the present invention is to provide a sample holder for an electron microscope in which a plurality of sample stages are disposed, in which at least one of the sample stages is moveable, and for which a plurality of transmission electron microscope samples can be fabricated by a focused ion beam. A holder opening part (9) is provided at a tip part of a sample holder (1). In addition, the back end part of the sample holder (1) has a knob (5), a rotating mechanism (6), a rough movement mechanism (7), and a connector (8). Fixation of the rotating mechanism (6) is released by pressing the knob (5), and the part of the back end part located further rearward from the rotating mechanism (6) as well as the tip part rotates. Sample disposition can be rotated by this rotating mechanism for the case of observing by the transmission electron microscope and the case of fabricating transmission electron microscope samples by a focused ion beam. In addition, the sample stage can be moved by the rough movement mechanism (7) and a fine movement mechanism. |
