| 摘要 |
PROBLEM TO BE SOLVED: To provide an exfoliating device, an exfoliating system, an exfoliating method and an exfoliating program capable of properly exfoliating a substrate.SOLUTION: An exfoliating device according to an embodiment comprises a first holding section, an exfoliation section, and a second holding section. The first holding section suction-holds a first substrate of a superposed substrate formed by jointing the first substrate and a second substrate. The exfoliation section exfoliates the second substrate from the first substrate by applying a predetermined force to an outer edge of the superposed substrate. Then, the second holding section suction-holds the second substrate exfoliated from the first substrate by the exfoliation section under a non-contact state. |
