THERMAL TREATMENT APPARATUS AND METHOD OF CONTROLLING THERMAL TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thermal treatment apparatus 2 capable of speedily recovering a temperature in the thermal treatment apparatus 2 when the temperature in the thermal treatment apparatus 2 changes owing to disturbance.SOLUTION: The thermal treatment apparatus includes: a treatment chamber 4 in which a workpiece W is put; a heating section 52 which heats the workpiece W; a temperature detection section 60 which detects a temperature in the treatment chamber 4; and a control section 70 which sets a second set temperature equal to the temperature detected by the temperature detection section 60 when the temperature detected by the temperature detection section 60 becomes lower than a first set temperature having been set in advance owing to disturbance, controls the heating section 52 so that the temperature detected by the temperature detection section 60 becomes equal to a third set temperature between the second set temperature and the first set temperature, and also controls the heating section 52 so that the temperature detected by the temperature detection section 60 becomes equal to the first set temperature after the temperature detected by the temperature detection section 60 becomes equal to the third set temperature.