| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding frame body that can safely store/transport large-sized substrates of about two meter square, and to provide a conveyance method of the substrate holding frame body, because the substrate holding frame body is to be used for transporting or storing a plurality of large-sized glass substrates while mounting and stacking the substrates, it is required to have a strength against impact and vibration at transport, and simultaneously, it is required to prevent occurrence of poor quality of products caused by foreign matter adhesion to or scratches on the substrates by dust generation.SOLUTION: There are provided: a substrate holding frame body, in which regarding the cross section of a pair of metal frame parts facing each other, an upper surface side has a recessed shape and a lower surface side has a protrusion shape, a suction part for suspending the substrate holding frame body is provided on the bottom part of the recessed part of the upper surface side, and the depth of the recessed part of the upper surface is greater than the height of the protrusion part of the lower surface; and a method of sucking and conveying the substrate holding frame body. |
