| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of the possibility of deterioration in measurement accuracy in a conventional scatterometry method.SOLUTION: An emission part 11 emits light on a pattern. A controller 13 controls the emission part 11 and makes the light enter each of a plurality of positions on the pattern. A detector 12 detects reflected diffraction light from each position according to the light. A measurement part 14 measures the structure of the pattern on the basis of each detection result. |
